>>106983003
No, pic related. They even mention it on ASML's website, but obviously downplay the role the Department of Energy had in this (i.e. wholly developing the technology).
>>106980267
It was meant to beat the Japanese to market, which is why the DoE came off classified research to do so. We absolutely could have developed the optics side. If we can grind SAR transformation mirrors for spy satellites, we can 100% grind optics for EUV machines. I think a lot of that was left to SVG because there is a whole range of classified projects revolving around this field (looking at you optical phase conjugation).
>>106984354
Only anon that knows. This is the REAL reason why they are export restrictions on EUV machines to China. The real tell that this was something naughty once upon a time is that it's Sandia that's the applicant. Sandia doesn't do non-weapons related research. UC Board of Regents gets a piece because they run LLNL and Sandia jointly with whatever glownigger contractor for the government (Lockheed, Bechtel, Honeywell, etc.).