>>507373346THIS IS CORRECT
ALSO LITERALLY ALL THE TECH HARDWARE FROM TRANSISTORS TO EUV
AMERICAN
https://www.osti.gov/biblio/16710
Advanced Microtechnology Program (AMP)
Since the early 1990s, the Advanced Microtechnology Program (AMP) has
become one of LLNL’s fastest growing industrial outreach activities. AMP
includes the Imaging and Detection Group, which is breaking new ground in
obtaining, processing, and analyzing images. AMP’s successful partnering with
industry is both a payoff from DOE’s Technology Transfer Initiative and a model
for future industry interactions of developing and spinning off commercial
technology.
AMP’s largest project, extreme ultraviolet lithography (EUVL), has transi-
tioned from a Technology Transfer Initiative-sponsored partnership with
industry to a completely industrially funded program. The EUV Limited
Liability Corporation has signed a Cooperative Research and Development
Agreement with three national laboratories—LLNL, Sandia National Laboratories,
and Lawrence Berkeley Laboratory—who formed a “Virtual National Laboratory”
to act as a single unit to provide short-wavelength [approximately 13 nanometers
(nm)] projection lithography capability for mass production of integrated
circuits [features less than 0.10 microns (μm)]. Many award-winning inventions
have been developed as a result, including the Veeco IBD 350 system that
reduced defect density by a factor of 105 on films critical to device fabrication
in the $120 billion semiconductor and the $100 billion magnetic recording
industries. To build the world’s most accurate optics, AMP developed the
Absolute Interferometer, a revolutionary yet conceptually simple optical
measuring tool increasing accuracy 100-fold to measure surfaces absolutely to
atomic dimensions, less than 1 nm.
