>>96145679
Xenosaga can fit into this category. They have an enemy called the Gnosis which are actually the souls of people who refuse to join the collective conciousness. They can have many shapes and some are even made out of whole planets (which happens in game) or an entire Solar System.

Then of course comes the massive scale such as the size of such super structures as the Song of Nephilim and the even bigger Proto Merkabah and super weapons such as KOSMOS's Phase Transfer Cannon